Performance and Modeling of a Fully Packaged MEMS Optical Microphone
Friday, April 8, 2011 4:00 p.m. in ETC 4.120 Michael Kuntzman Department of Electrical and Computer Engineering The University of Texas at Austin http://www.ece.utexas.edu A microelectromechanical systems (MEMS) optical microphone that measures the interference of light resulting from its passage through a diffraction grating and reflection from a vibrating diaphragm (JASA, v. 122, no. 4,…