Micromachined Optical Diffraction-Based Sound and Vibration Sensors
Friday, February 27, 2009 4:00 p.m. in ETC 4.120 Professor Neal A. Hall Department of Electrical and Computer Engineering The University of Texas at Austin www.ece.utexas.edu This presentation will summarize recent developments with micromachined microphones employing diffraction-based optical displacement detection. The approach has the advantage of providing high-displacement detection resolution of the microphone diaphragm, independent…